The Swiss sensor manufacturer Sensirion AG is expandingits technology portfolio for liquid flow sensor solutions. The microsensor specialist has announced a new level of miniaturisation
for non-invasive liquid flow sensors based on planar microfluidic substrates. Innovative packaging enables Sensirion’s highly sensitive thermal flow sensor microchips to measure
non-invasively through the wall of a flow channel inside a microfluidic substrate. This design provides sensitivity for liquid flow measurement and bubble detection in the microliter range. A small digital CMOSens microchip (2.2 x 3.5mm) is bonded to the microfluidic channel substrate. Beside the sensor element it houses the complete
digital intelligence as well as the memory necessary for signal linearisation, temperature compensation and self-test algorithms.